Equipped with a new type of clean manipulator, the pre-alignment and direct drive of the line shaft constitute a sorting system that can achieve high productivity. Load port can be mounted on both sides of EFEM, which can realize subsequent LP addition and various monomer addition according to demand. Compatible with factory OHT and AGV.
High capacity is achieved through the use of two Aligners.
The Edge Clamp is used to prevent the Particle from being transferred to the back of the wafer.
ID of the positive and negative sides of the Wafer can be read
It can be directly connected to OHT or used with Stocker
Transfer instructions can be executed on the Touch Panel, and the operation is simple and easy to understand.
Model: RSC132
Load Port Number: 2 ports
Moving object: 300mm Wafer: Φ300±0.2mm thickness: 775μm
Cartridge: 300mm FOUP 25 section (SEMI E47.1) 300mm FOSB 25 section (SEMI M31)
Power supply voltage: single-phase AC200V±10% 50/60Hz±5%
Current consumption: 4kVA (20A/200VAC) including FFU
Vacuum (element pressure) : -80kPa ~ -90kPa
Vacuum (flow) : 30L/min
Air (element pressure) : 0.6MPa ~ 0.7MPa
Air (flow) : 20L/min
Model: RSC142
Load Port Number: 3 ports
Moving object: 300mm Wafer: Φ300±0.2mm thickness: 775μm
Cartridge: 300mm FOUP 25 section (SEMI E47.1) 300mm FOSB 25 section (SEMI M31)
Power supply voltage: single-phase AC200V±10% 50/60Hz±5%
Current consumption: 4kVA (20A/200VAC) including FFU
Vacuum (element pressure) : -80kPa ~ -90kPa
Vacuum (flow rate) : 40L/min
Air (element pressure) : 0.6MPa ~ 0.7MPa
Air (flow) : 30L/min
