The PLVS/vacuum platform is a clean handling system which has high positioning repeatability and highly reliable vacuum partition performance using various units of the DDM (vacuum direct drive motor) drive section, which is a common feature of the vacuum robot and vacuum aligner. The simple and high performance vacuum handling system is realized by combining system configurations to meet the needs of the customer to apply to various semiconductor applications such as E-Beam Lithography, PVC, CVD, Etch, MR Head Deposition, MEMS, and Inspection & Metrology.

Suitable system configuration and smallest footprint.

Clean transferring operation.

Ultrahigh vacuum.

High throughput.