The model RV201-F07-N is a N2 bottom purge type load port. Original nozzle mechanism is used for gas control by mass flow controller. The door opening/closing mechanism of the standard model is inherited, opening/closing of the FOUP door is precisely controlled, and high level cleanliness performance is realized.

Available for FOUP and Auto Door FOSB as a standard.

High cleanliness performance is attained by the original door opening/closing mechanism and precise motion control.

Low pressure loss filter is built in.

Original nozzle is mounted.