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RR759L27

RR759 is a boomerang arm robot and all axes have stepping motors with absolute encoders. The synchronous interpolation of the arm axis and rotation axis enables 2-port access without the X-axis track. The double arms exchange wafers in the shortest period of time to improve the transferring throughput. The robot X-axis track can be added outside to perform the simultaneous control from the robot side including the teaching positions. Accessing to all directions without rotation dead angle is allowed.

Stepping servo motors with ABS encoders are mounted on all axes.

2-port access without X-axis track is available.

Heavier hand can be equipped by increasing the arm rigidity.

Control of the robot X-axis track is available.

Accessing to all directions without rotation dead angle is allowed.

Long-reach transfer is available.

In principle, RR759 is sold only as an integrated system products.

Arm/EE: double
Arm length (mm): 270
Z-axis stroke (mm): 190/420/550
Maximum transfer distance (mm) ※1: R962
Rotation range (deg): 420
Transfer accuracy (mm): ±0.1
Cleanliness level: ISO class 1
Radius of rotation (deg) ※2: R320
Encoder Specifications: absolute encoder

※1 Take 300mm Wafer as an example
※2 Depending on the length of Wrist and EE, it will vary.